LIGA and its Applications

Name: LIGA and its Applications
Author: Volker Saile

Gebonden Engels 2009 9783527316984

Verwachte levertijd ongeveer 8 werkdagen

306,80

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Samenvatting

Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies.

This book is of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.

Specificaties

ISBN13:9783527316984

Taal:Engels

Bindwijze:gebonden

Aantal pagina's:479

Uitgever:John Wiley & Sons

Druk:1

Hoofdrubriek:IT-management / ICT

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Inhoudsopgave

List of Contributors.

1. Introduction: LIGA and Its Applications (Volker Saile).
2. X-ray Makssk for LIGA Microfabrication (Yohannes Desta and Jost Goettert).
3. Innovative Exposure Techniques for 3D Microfabrication (Naoki Matsuzuka and Osamu Tabata).
4. Hot Embossing of LIGA Microstructures (Mathias Heckele and Matthias Worgull).
5. Exposure and Development Simulation for Deep X-ray LIGA (Jan G. Korvink, Sadik Hafizovic, Yoshikzau Hirai, and Pascal Meyer).
6. Design for LIGA and Safe Manufacturing (Ulrich Gengenbach, Ingo Sieer, and Ulrike Wallrabe).
7. Commercialization of LIGA (Ron A. Lawes).
8. Polymer Optics and Optical MEMS (Jurgen Mohr).
9. Refractive X-ray Lenses Produced by X-ray Lithography (Arndt Last).
10. RF Applications (Sven Achenbach and David M. Klymyshyn).
11. Evolution of the Microspectrometer (Reiner Wechsung, Sven Schonfelder, adn Andreas Decker).
12. Actuator Manufacture with LIGA Processes (Todd Christenson).
13. Development of Microfluidic Devices created via the LIA Process (Masaya Kurokawa).
13. Development of Microfluidic Devices Created via the LIGA Process (Masaya Kurokawa).
14. Application of Inspection Devices (Yoshihiro Hirata).
15. The Micro Harmonic Drive Gear (Reinhard Degen and Rolf Slatter).
16. Microinjection Molding Machines (Christian Gornik).
17. Filled Resist Systems (Thomas Hanemann, Claas Muller, and Michael Schulz).
18. Dramatic Downsizing of Soft X-ray Synchrotron Light Source from Compact to Tabletop (Hironari Yamada, Norio Toyosugi, Dorian Minkov, and Yoshiko Okazaki).
19. PTFE Photo-favrication by Synchrotron Radiation (Takanori Katoh and Yanping Zhang).

Index.