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CMOS Hotplate Chemical Microsensors

Paperback Engels 2010 9783642089107
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Samenvatting

The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.

Specificaties

ISBN13:9783642089107
Taal:Engels
Bindwijze:paperback
Aantal pagina's:125
Uitgever:Springer Berlin Heidelberg
Druk:0

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Inhoudsopgave

Miniaturized Metal-Oxide Sensors.- Thermal Modelling of CMOS Microhotplates.- Microhotplates in CMOS Technology.- Monolithic Gas Sensor Systems.- Microsensor Arrays.- Conclusion and Outlook.

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€ 120,99
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        CMOS Hotplate Chemical Microsensors