Weimin Zhou
Nanoimprint Lithography: An Enabling Process for Nanofabrication
Gebonden Engels 2013 2013e druk 9783642344275Levertijd ongeveer 9 werkdagen
Gratis verzonden
Samenvatting
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application.
This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology.
Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.
Specificaties
ISBN13:9783642344275
Taal:Engels
Bindwijze:gebonden
Aantal pagina's:249
Uitgever:Springer Berlin Heidelberg
Druk:2013
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Inhoudsopgave
Principles and statues of nanoimprint lithography.- Stamp Fabrication.- stamp surface treatment.- Nanoimprint lithography resists.- Nanoimprint lithography process.- Modeling and Simulation of NIL.- Application of NIL in Light emitting Diodes.- Application of NIL in memory devices.- Application of NIL in solar cell.
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